These were by the way the ratings in Germany of the last few years:
2009: 6,13 Mio. (2,97 Mio.)
2010: 14,69 Mio. (8,38 Mio.)
2011: 13,83 Mio. (7,34 Mio.)
2012: 8,29 Mio. (4,11 Mio.)
2013: 8,21 Mio. (4,25 Mio.)
At the end are the numbers of viewers between 14 and 49 years of age.
2014: 8,96 Mio. (4,48 Mio.)
Market share:
overall: 34,7%
14-49: 41,9%
The ARD generally only get such a high market share among young people with football games of the national team.
I also found some ratings for the semis in Germany. Both semis were shown live on two channels at the same time, Phoenix and EinsPlus.
1th semi on Phoenix:
270.000 viewers overall (1,0%)
market share 14-49: 1,4%
2nd semi on Phoenix:
470.000 viewers overall (1,7%)
market share 14-49: 2,5%
EinsPlus doesn't publish ratings, but it is also a very small channel and they showed during the whole shows tweets on the right side of the screen, which some may have found annoying.
Ratings for the 2nd semi in Austria. Channel ORF.
Start of the show: 652.000 viewers (24%)
From 22:45 onward: 822.000 viewers (44%)